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The first technological process for the production of truly three-dimensional microcircuits is presented

BeSang, a non-manufacturing company, demonstrated chips that use 128 million vertical transistors to implement memory over logic control circuits. The chip was designed jointly by specialists from the Korean National Nanofab Center and the American Stanford Nanofab. BeSang said the more than 25-patent process used to make the chip will allow flash, DRAM and SRAM to be stacked on top of logic circuits, microprocessor cores and SoCs.

The developers chose the following approach: first, using a high-temperature process (850 ° С), the logical part of the circuit was executed, and then, on top of it, using a low-temperature process of our own design (400 ° С), the memory was “superimposed”. By placing logic and memory in different layers of one three-dimensional microcircuit, it was possible to increase the degree of integration and reduce the specific cost of the chip.

According to experts, developments in this area that existed before BeSang were pseudo-three-dimensional. This is the term used by Professor Simon Sze, one of those who in 1967 invented the floating gate transistor for non-volatile memory cells.

The demo chip was manufactured using CMOS technology using 180nm standards. Its structure includes a layer of vertical transistors, suitable for the manufacture of flash memory or random access memory such as DRAM and SRAM. The memory layer has been transferred from the donor plate. The lower layer was separated from the upper one by a silicon single crystal. The layers are interconnected by two layers of metal bonds.

Source: EE Times

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